‧为什么客户会选择 Rorze ?!
1.超洁净robot的领先者
Rorze Robot Concept -Cleanliness-
Rorze clean robot是世界上首具晶圆搬送时无微尘颗粒的晶圆搬送robot (in 1986)
‧Magnetic sealed to all axes
‧Edge-clamp mechanism also sealed by
magnetic (ferrofluidic) seal.
‧Skirt-type body to prevent escape of
particles
‧Class 1
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2.No.1 Cleanliness
‧ Rorze Real Clean System
Wafer handling area is completely sealed by “Pressure Isolation board”.
No factor of particle generation at wafer handling area
3.No.1 Reliability
RR701 Robot MTBF More than 15 years MTBF install basis
4.No.1 Accuracy
RR701 Robot MTBF More than 15 years MTBF install basis
‧Rorze robot concept for Accuracy
Accuracy
用3 Ball Screw的优点
(Arm移动时的robot倾斜度比较)
‧Rorze robot concept for Accuracy
Accuracy
◆ EFEM transfer accuracy： ±0.2mm（X-Y）
◆ With 3 ball screws(120°layout),
4 times higher stiffness for improved accuracy for horizontal direction
(important for wafer positioning)
5. 无需维护的系统
‧Maintainance Free system
‧W/ reliable robots, loadports.
‧Achived very low COO;
Robot : maintainance free
(recommend 5 yr.Refurbishment/OH)
‧Consumable parts; pads on
end-effector only/ 5 yr.
(spare parts consumption:
<$500 / 5yr. Average)
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6. 自行设计的软体
人性化操作介面
触控面板
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