Lezi Xinchuang Automation Equipment (Shanghai) Co., Ltd.

On the basis of the original Wafer sorter, the storage space of Bare wafer is increased.
It is a composite of the Stocker function and the usual Wafer sorter function for production
A type of machine. The small size of the floor area is used to realize the sorting and storage of wafers.

● Can store 600 wafers, and can be managed by region
● Using high-speed monomer and structure, using the best transfer method for Wafer sorting
● Built-in shutters isolate the microenvironments inside Stocker and Sorter
● Automatic Teaching function to shorten the Teaching time
● Can read both sides of the Wafer ID

Model: BWS600 RSC172
Moving object: 300mm Wafer: Φ300±0.2mm thickness: 775μm±20μm
Cartridge: 300mm FOUP 25 section (SEMI E47.1) 300mm FOSB 25 section (SEMI M31)
Power supply voltage: 3-phase AC200V ~ AC220V±10% 50/60Hz±5%
Current consumption: 14kVA (40A/200VAC) including FFU
Vacuum (element pressure) : -80kPa ~ -90kPa
Vacuum (flow) : 50L/min
Air (element pressure) : 0.6MPa ~ 0.7MPa
Air (flow) : 50L/min

Bare Wafer Stocker